Publication:

PZT micro-transfer printing for photonic MEMS

Date

2023
Proceedings Paper
https://doi.org/10.1109/IPC57732.2023.10360713
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dc.contributor.authorAnsari, Irfan
dc.contributor.authorDe Geest, Kobe
dc.contributor.authorDe Witte, Jasper
dc.contributor.authorVandekerckhove, Tom
dc.contributor.authorRijckaert, H.
dc.contributor.authorPicavet, E.
dc.contributor.authorLievens, E.
dc.contributor.authorFeutmba, G. F.
dc.contributor.authorVan de Veire, T.
dc.contributor.authorKuyken, Bart
dc.contributor.authorBeeckman, J.
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorLievens, E.
dc.contributor.imecauthorFeutmba, G. F.
dc.contributor.imecauthorAnsari, Irfan
dc.contributor.imecauthorDe Geest, Kobe
dc.contributor.imecauthorDe Witte, Jasper
dc.contributor.imecauthorVandekerckhove, Tom
dc.contributor.imecauthorKuyken, Bart
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecDe Witte, Jasper::0000-0003-1145-4676
dc.contributor.orcidimecVandekerckhove, Tom::0000-0002-5639-9300
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned2024-05-23T15:04:20Z
dc.date.available2024-03-07T17:40:09Z
dc.date.available2024-05-23T15:04:20Z
dc.date.issued2023
dc.description.wosFundingTextGhent University-BOFGOA2020000103; Horizon Europe- grant 101070622 (VISSION); FWO- grant 1S68218N, 11H6723N, 1273621N and 1S69123N.
dc.identifier.doi10.1109/IPC57732.2023.10360713
dc.identifier.eisbn979-8-3503-4722-7
dc.identifier.issn2374-0140
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43636
dc.publisherIEEE
dc.source.conferenceAnnual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedateNOV 12-16, 2023
dc.source.conferencelocationOrlando
dc.source.journalN/A
dc.source.numberofpages2
dc.subject.keywordsSILICON
dc.title

PZT micro-transfer printing for photonic MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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