Publication:

Impact of acoustical reflections on megasonic cleaning performance

Date

2009
Meeting abstract
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dc.contributor.authorBrems, Steven
dc.contributor.authorHauptmann, Marc
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorPacco, Antoine
dc.contributor.authorHalder, Sandip
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorDoumen, Geert
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2021-10-17T21:28:12Z
dc.date.available2021-10-17T21:28:12Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15041
dc.source.beginpage2089
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.title

Impact of acoustical reflections on megasonic cleaning performance

dc.typeMeeting abstract
dspace.entity.typePublication
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