Publication:
Developing a conductive oxide barrier for ferroelectric integration
Date
| dc.contributor.author | Johnson, Jo | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Wouters, Dirk | |
| dc.date.accessioned | 2021-10-15T05:03:19Z | |
| dc.date.available | 2021-10-15T05:03:19Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7700 | |
| dc.source.beginpage | 377 | |
| dc.source.endpage | 383 | |
| dc.source.issue | 2_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 70 | |
| dc.title | Developing a conductive oxide barrier for ferroelectric integration | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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