Publication:

Reduction of mask induced CD errors by optical proximity correction

Date

1998

Proceedings Paper

Simple item page Full metadata Statistics

Files

2466.pdf 1.27 MB

Author(s)

;

Tritchkov, Alexander

;

Jonckheere, Rik

;

Jaenen, Patrick

;

Statistics

1929 since deposited on 2021-10-01

Acq. date: 2026-05-02