Publication:
Fabrication of poly-SiGe MEMS structures with a substrate budget of 250°C
Date
| dc.contributor.author | El Rifai, Joumana | |
| dc.contributor.thesisadvisor | Van Hoof, Chris | |
| dc.contributor.thesisadvisor | Puers, Bob | |
| dc.date.accessioned | 2021-10-20T10:51:46Z | |
| dc.date.available | 2021-10-20T10:51:46Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2012-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20642 | |
| dc.title | Fabrication of poly-SiGe MEMS structures with a substrate budget of 250°C | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |