Publication:
Advancing X-ray metrology for routine thin film analysis
Date
| dc.contributor.author | Makhotkin, Igor | |
| dc.contributor.author | Fathabad, Zahra | |
| dc.contributor.author | Yakunin, Sergey | |
| dc.contributor.author | van de Kruijs, Robbert | |
| dc.contributor.author | Philipsen, Vicky | |
| dc.contributor.author | Luong, Vu | |
| dc.contributor.author | Bijkerk, Fred | |
| dc.contributor.imecauthor | Makhotkin, Igor | |
| dc.contributor.imecauthor | Philipsen, Vicky | |
| dc.contributor.imecauthor | Luong, Vu | |
| dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
| dc.date.accessioned | 2021-10-25T22:45:31Z | |
| dc.date.available | 2021-10-25T22:45:31Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31263 | |
| dc.source.conference | 13th International MicroNanoConference - iMNC | |
| dc.source.conferencedate | 11/12/2018 | |
| dc.source.conferencelocation | Amsterdam Netherlands | |
| dc.title | Advancing X-ray metrology for routine thin film analysis | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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