Publication:
Stochastic Printing Failures in EUV Lithography
Date
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Hendrickx, Eric | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.imecauthor | Hendrickx, Eric | |
| dc.date.accessioned | 2021-10-27T08:21:49Z | |
| dc.date.available | 2021-10-27T08:21:49Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32790 | |
| dc.identifier.url | https://doi.org/10.1117/12.2515082 | |
| dc.source.beginpage | 109570E | |
| dc.source.conference | Extreme Ultraviolet (EUV) Lithography X | |
| dc.source.conferencedate | 24/02/2019 | |
| dc.source.conferencelocation | San Jose USA | |
| dc.title | Stochastic Printing Failures in EUV Lithography | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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