Publication:
The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
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1897 since deposited on 2021-10-27
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Acq. date: 2025-10-25
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Views
1897 since deposited on 2021-10-27
455item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations