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The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
Publication:
The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition
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Date
2019
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brady-Boyle, Anita
;
O'Connor, Robert
;
Armini, Silvia
;
Selvaraju, V
;
Bogan, Justin
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1901
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Acq. date: 2025-12-11
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Views
1901
since deposited on 2021-10-27
1
last month
1
last week
Acq. date: 2025-12-11
Citations