The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates

dc.contributor.author	Nagar, Magi
dc.contributor.author	Radisic, Alex
dc.contributor.author	Strubbe, Katrien
dc.contributor.author	Vereecken, Philippe
dc.contributor.imecauthor	Radisic, Alex
dc.contributor.imecauthor	Vereecken, Philippe
dc.contributor.orcidimec	Vereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned	2021-10-21T10:20:23Z
dc.date.available	2021-10-21T10:20:23Z
dc.date.issued	2013
dc.identifier.issn	0013-4686
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22845
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S001346861300056X
dc.source.beginpage	474
dc.source.endpage	483
dc.source.journal	Electrochimica Acta
dc.source.volume	92
dc.title	The effect of cupric ion concentration on the nucleation and growth of copper on RuTa seeded substrates
dc.type	Journal article
dspace.entity.type	Publication
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