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Effect of chemical solution on the stability of low-k films
Publication:
Effect of chemical solution on the stability of low-k films
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Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kesters, Els
;
Le, Quoc Toan
;
Baklanov, Mikhaïl
;
Boullart, Werner
;
Mertens, Paul
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1843
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations
Metrics
Views
1843
since deposited on 2021-10-16
Acq. date: 2025-12-16
Citations