Publication:
0.5µm and 0.35µm BiCMOS - silicon etch developement at IMEC
Date
| dc.contributor.author | Beckx, Stephan | |
| dc.contributor.imecauthor | Beckx, Stephan | |
| dc.date.accessioned | 2021-09-30T11:27:04Z | |
| dc.date.available | 2021-09-30T11:27:04Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2382 | |
| dc.source.conference | LAM Symposium; 1 April 1998; Geneva, Switzerland. | |
| dc.source.conferencelocation | ||
| dc.title | 0.5µm and 0.35µm BiCMOS - silicon etch developement at IMEC | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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