A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

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Author(s)

Cacciato, Antonio

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Breuil, Laurent

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Dekkers, Harold

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Zahid, Mohammed

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Kar, Gouri Sankar

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Everaert, Jean-Luc

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Van den Bosch, Geert

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;

Debusschere, Ingrid

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;

Cockburn, Andrew

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Metrics

1972 since deposited on 2021-10-18

Acq. date: 2025-10-23