Publication:

A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Date

2010
Proceedings Paper
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Author(s)

Cacciato, Antonio
;
Breuil, Laurent  
;
Dekkers, Harold  
;
Zahid, Mohammed
;
Kar, Gouri Sankar  
;
Everaert, Jean-Luc
;
Schoofs, Geert  
;
Van den Bosch, Geert  
;
Jurczak, Gosia  
;
Debusschere, Ingrid  
;
Van Houdt, Jan  
;
Cockburn, Andrew  
;
Date, Lucien  
;
Xa, Li-Qun
;
Le, Maggie
;
Lee, Won

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1976 since deposited on 2021-10-18
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