Publication:
Simulations of diffusion barrier deposition on porous low-k films
Date
| dc.contributor.author | Yanovitskaya, Z.S. | |
| dc.contributor.author | Zverev, A.V. | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T07:55:54Z | |
| dc.date.available | 2021-10-15T07:55:54Z | |
| dc.date.issued | 2003-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8428 | |
| dc.source.beginpage | 363 | |
| dc.source.endpage | 367 | |
| dc.source.issue | 2_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 70 | |
| dc.title | Simulations of diffusion barrier deposition on porous low-k films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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