Publication:

Challenges of monolithic integration for SiGe MEMS Technology

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorFrancis, Laurent
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-23T14:04:45Z
dc.date.available2021-10-23T14:04:45Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27196
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7808583/
dc.source.beginpage1
dc.source.conferenceIEEE SENSORS
dc.source.conferencedate30/10/2016
dc.source.conferencelocationOrlando, FL USA
dc.source.endpage3
dc.title

Challenges of monolithic integration for SiGe MEMS Technology

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
34782.pdf
Size:
1.06 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions