Publication:
Dry etch challenges in a 20 nm half-pitch single damascene spacer-defined patterning scheme
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1927 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1927 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-15
Citations