Publication:
Dry etch challenges in a 20 nm half-pitch single damascene spacer-defined patterning scheme
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1929 since deposited on 2021-10-18
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Acq. date: 2026-10-08
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Views
1929 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-10-08
Citations