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Extraction of Roughness Measurements from Thin Resists with Low Signal-to-Noise-Ratio (SNR) SEM Images by Applying Deep Learning Denoiser
Publication:
Extraction of Roughness Measurements from Thin Resists with Low Signal-to-Noise-Ratio (SNR) SEM Images by Applying Deep Learning Denoiser
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Date
2022
Proceedings Paper
https://doi.org/10.1117/12.2643315
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zidan, Mohamed
;
Dey, Bappaditya
;
De Simone, Danilo
;
Severi, Joren
;
Charley, Anne-Laure
;
Halder, Sandip
;
Leray, Philippe
;
De Gendt, Stefan
;
Lorusso, Gian
Journal
SPIE Photomask Technology + EUV Lithography 2022
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1319
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Acq. date: 2025-12-15
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Metrics
Views
1319
since deposited on 2023-03-22
1
last month
Acq. date: 2025-12-15
Citations