Publication:

Critical role of degassing for hot aluminum filling

Date

1998
Journal article
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dc.contributor.authorProost, Joris
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorVereecke, Guy
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-01T08:43:58Z
dc.date.available2021-10-01T08:43:58Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2883
dc.source.beginpage2091
dc.source.endpage2098
dc.source.issue4
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume16
dc.title

Critical role of degassing for hot aluminum filling

dc.typeJournal article
dspace.entity.typePublication
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