Low-k integration: Gas screening for cryogenic etching and damage mitigation

Simple item page Full metadata Statistics

Author(s)

Chanson, Romain

;

;

Tillocher, Thomas

;

Lefaucheux, Philippe

;

Dussarrat, Christian

;

de Marneffe, Jean-Francois

Journal

Frontiers of Chemical Science and Engineering

Metrics

1986 since deposited on 2021-10-27

Acq. date: 2025-10-23