Publication:

Spacer-defined EUV lithography reducing variability of 12nm NAND Flash memories

Date

2012
Proceedings Paper
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Author(s)

Poliakov, Pavel
;
Blomme, Pieter  
;
Vaglio Pret, Alessandro  
;
Miranda Corbalan, Miguel
;
Gronheid, Roel  
;
Wiaux, Vincent  
;
Versluijs, Janko  
;
Verkest, Diederik  
;
Van Houdt, Jan  
;
Dehaene, Wim  

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