Publication:

Self-organized organic/inorganic films functional to next generation metallization schemes

Date

2014
Meeting abstract
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dc.contributor.authorArmini, Silvia
dc.contributor.authorCarnevali, Guido
dc.contributor.authorSun, Yiting
dc.contributor.authorZhang, Liping
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorZhang, Yu
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDelande, Tinne
dc.contributor.authorWen, Liang Gong
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.date.accessioned2021-10-22T00:43:56Z
dc.date.available2021-10-22T00:43:56Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23500
dc.source.beginpageC4-IT-0541
dc.source.conferenceIUMRS-ICEM - International Conference on Electronic Materials
dc.source.conferencedate8/06/2014
dc.source.conferencelocationTaipeh Taiwan
dc.title

Self-organized organic/inorganic films functional to next generation metallization schemes

dc.typeMeeting abstract
dspace.entity.typePublication
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