Publication:

Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators

Date

 
dc.contributor.authorZanaty, Mohamed
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorAbbas, Mohamed
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-20T19:29:46Z
dc.date.available2021-10-20T19:29:46Z
dc.date.issued2012-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21908
dc.identifier.urlhttp://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D05_1661_MME2012_120730.pdf
dc.source.conference23rd Micromechanics and Microsystems Europe Conference
dc.source.conferencedate9/09/2012
dc.source.conferencelocationIlmenau Germany
dc.title

Influence of the nonlinearity introduced by the Van der Waals force on the behaviour of NEM resonators

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: