Publication:

Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures

Date

2008
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Author(s)

Carbonell, Laure
;
Volders, Henny  
;
Heylen, Nancy  
;
Kellens, Kristof  
;
Tokei, Zsolt  
;
Hendrickx, Dirk  
;
Struyf, Herbert  
;
Vandervorst, Alain
;
Claes, Martine  
;
Lux, Marcel  
;
Versluijs, Janko  
;
Alaerts, Wilfried  
;
Van Besien, Els  
;
Deweerdt, Bruno  
;
Vaes, Jan
;
Caluwaerts, Rudy  
;
Cockburn, Andrew  
;
Gravey, Virginie
;
Shah, Kavita
;
Al-Bayati, A.
;
Fu, X.
;
Lubben, D.
;
Sundarrajan, A.
;
Beyer, Gerald  

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