Publication:

Advanced capabilities and applications of a sputter-RBS system

Date

1999
Proceedings Paper
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dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-06T10:45:31Z
dc.date.available2021-10-06T10:45:31Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3270
dc.source.beginpage586
dc.source.conferenceApplications of Accelerators in Research and Industry: Proceedings of the 15th International Conference
dc.source.conferencedate4/11/1998
dc.source.conferencelocationDenton, TX USA
dc.source.endpage591
dc.title

Advanced capabilities and applications of a sputter-RBS system

dc.typeProceedings paper
dspace.entity.typePublication
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