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Characterization of (near) hermetic zero-level packages for MEMS

Date

2005
Proceedings Paper
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dc.contributor.authorDe Moor, Piet
dc.contributor.authorBaert, Kris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorJourdain, Anne
dc.contributor.authorTilmans, Harrie
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T01:09:31Z
dc.date.available2021-10-16T01:09:31Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10309
dc.source.beginpage26
dc.source.conferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
dc.source.conferencedate24/01/2005
dc.source.conferencelocationSan Jose, CA USA
dc.source.endpage35
dc.title

Characterization of (near) hermetic zero-level packages for MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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