Publication:

Vapor phase thiol self-assembled monolayers for ALD blocking

Date

2018

Meeting abstract

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Files

41190.pdf 736.95 KB

Author(s)

Herregods, Sebastiaan

;

Lecordier, Laurent

;

;

;

Struyf, Herbert

;

Statistics

1983 since deposited on 2021-10-25

Acq. date: 2026-02-26