Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Vapor phase thiol self-assembled monolayers for ALD blocking
Publication:
Vapor phase thiol self-assembled monolayers for ALD blocking
Copy permalink
Date
2018
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
41190.pdf
736.95 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Herregods, Sebastiaan
;
Lecordier, Laurent
;
Delande, Tinne
;
Tokei, Zsolt
;
Struyf, Herbert
;
Armini, Silvia
Journal
Abstract
Description
Metrics
Views
1983
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1983
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-16
Citations