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Connected component analysis of review-SEM images for sub-10nm node process verification
Publication:
Connected component analysis of review-SEM images for sub-10nm node process verification
Date
2017
Proceedings Paper
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35465.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Halder, Sandip
;
Leray, Philippe
;
Sah, Kaushik
;
Cross, Andrew
;
Parisi, Paolo
Journal
Abstract
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1918
since deposited on 2021-10-24
Acq. date: 2025-10-25
Citations
Metrics
Views
1918
since deposited on 2021-10-24
Acq. date: 2025-10-25
Citations