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Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25μm MOS-technologies
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2 since deposited on 2021-10-01
Acq. date: 2025-12-16
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Acq. date: 2025-12-17
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2 since deposited on 2021-10-01
Acq. date: 2025-12-16
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1870 since deposited on 2021-10-01
Acq. date: 2025-12-17
Citations