Publication:
Electrodeposition for copper metallization
Date
| dc.contributor.author | Brongersma, Sywert | |
| dc.contributor.imecauthor | Brongersma, Sywert | |
| dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
| dc.date.accessioned | 2021-10-16T00:50:54Z | |
| dc.date.available | 2021-10-16T00:50:54Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10159 | |
| dc.source.conference | Advanced Metallization Conference | |
| dc.source.conferencedate | 26/09/2005 | |
| dc.source.conferencelocation | Colorado Springs, CO USA | |
| dc.title | Electrodeposition for copper metallization | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |