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Alternative semiconductor integration in Si microelectronics: materials, techniques & applications (Selected papers from the E-MRS 2013 Fall Meeting, Symposium A). Preface to the special issue

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2014-08
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dc.contributor.authorMuessig, Hans-Joachim
dc.contributor.editorSchroeder, Thomas
dc.contributor.editorCapellini, Giovanni
dc.contributor.editorLoo, Roger
dc.contributor.editorFompeyrine, Jean
dc.date.accessioned2021-10-22T04:00:58Z
dc.date.available2021-10-22T04:00:58Z
dc.date.embargo9999-12-31
dc.date.issued2014-08
dc.identifier.isbn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24284
dc.identifier.urlhttp://www.sciencedirect.com/science/journal/01679317/125
dc.source.numberofpages91
dc.title

Alternative semiconductor integration in Si microelectronics: materials, techniques & applications (Selected papers from the E-MRS 2013 Fall Meeting, Symposium A). Preface to the special issue

dc.typeBook
dspace.entity.typePublication
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