Publication:
Scanning probe microscopy for future semiconductor devices
Date
| dc.contributor.author | Paredis, Kristof | |
| dc.contributor.imecauthor | Paredis, Kristof | |
| dc.contributor.orcidimec | Paredis, Kristof::0000-0002-5163-4164 | |
| dc.date.accessioned | 2021-10-26T00:48:09Z | |
| dc.date.available | 2021-10-26T00:48:09Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31486 | |
| dc.identifier.url | https://www.parksystems.com/images/events/symposium/NSFE_Program_short.pdf | |
| dc.source.conference | 2018 NanoScientific Forum Europe | |
| dc.source.conferencedate | 10/10/2018 | |
| dc.source.conferencelocation | Freiberg Germany | |
| dc.title | Scanning probe microscopy for future semiconductor devices | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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