Publication:
Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations
Date
| dc.contributor.author | Camillo-Castillo, Renata | |
| dc.contributor.author | Law, M.E. | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | McCoy, S. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.date.accessioned | 2021-10-16T00:52:05Z | |
| dc.date.available | 2021-10-16T00:52:05Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10172 | |
| dc.source.conference | 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Daytona Beach, FL USA | |
| dc.title | Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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