Publication:

IGZO integration scheme for enabling IGZO nFETs

Date

2019
Proceedings Paper
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Author(s)

Kljucar, Luka  
;
Mitard, Jerome  
;
Rassoul, Nouredine  
;
Dekkers, Harold  
;
Steudel, Soeren
;
del Agua Borniquel, Jose Ignacio  
;
De Wachter, Bart  
;
Teugels, Lieve  
;
Tsvetanova, Diana  
;
Devriendt, Katia  
;
Grisin, Ilja
;
Boccardi, Guillaume  
;
Hody, Hubert  
;
Nag, Manoj  
;
Di Piazza, Luca  
;
Wilson, Chris  
;
Kar, Gouri Sankar  
;
Tokei, Zsolt  
;
Ramalingam, J.
;
Cao, Yong
;
Diehl, Daniel L.

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Acq. date: 2026-05-19

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2112 since deposited on 2021-10-27
Acq. date: 2026-05-19

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