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Litho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cell
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Litho variations and their impact on the electrical yield of a 32nm node 6T-SRAM cell
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Date
2008
Proceedings Paper
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14690.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Verhaegen, Staf
;
Cosemans, Stefan
;
Dusa, Mircea
;
Marchal, Pol
;
Nackaerts, Axel
;
Vandenberghe, Geert
;
Dehaene, Wim
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1907
since deposited on 2021-10-17
Acq. date: 2026-07-15
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Views
1907
since deposited on 2021-10-17
Acq. date: 2026-07-15
Citations