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Unbiased roughness measurements: Subtracting out SEM effects, part 3
Publication:
Unbiased roughness measurements: Subtracting out SEM effects, part 3
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Date
2019
Proceedings Paper
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44032.pdf
1.34 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mack, Chris
;
Van Roey, Frieda
;
Lorusso, Gian
Journal
Abstract
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1949
since deposited on 2021-10-27
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Acq. date: 2025-12-12
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Metrics
Views
1949
since deposited on 2021-10-27
2
last month
Acq. date: 2025-12-12
Citations