Publication:

New sensitive electrical measurement techniques for the study of stress induced voiding

Date

1997
Presentation
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dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorBender, Hugo
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-09-30T10:08:56Z
dc.date.available2021-09-30T10:08:56Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2314
dc.source.conferenceAdvanced Metallization and Interconnect Systems for ULSI Applications; 30 September - 2 October 1997; San Diego, Calif., USA.
dc.source.conferencelocation
dc.title

New sensitive electrical measurement techniques for the study of stress induced voiding

dc.typeOral presentation
dspace.entity.typePublication
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