Publication:

Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154710
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dc.contributor.authorMarien, Philippe
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorChoudhury, Subhobroto
dc.contributor.authorRadisic, Dunja
dc.contributor.authorDecoster, Stefan
dc.contributor.authorKundu, Shreya
dc.contributor.authorHermans, Yannick
dc.contributor.authorKenens, Bart
dc.contributor.authorDe Coster, Hanne
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorPeter, Antony
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorRyckaert, Julien
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorPark, Seongho
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorMarien, Philippe
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorChoudhury, Subhobroto
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorHermans, Yannick
dc.contributor.imecauthorKenens, Bart
dc.contributor.imecauthorDe Coster, Hanne
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecMarien, Philippe::0000-0001-5644-4442
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.contributor.orcidimecRadisic, Dunja::0009-0006-4655-5417
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecKundu, Shreya::0000-0001-8052-7774
dc.contributor.orcidimecHermans, Yannick::0000-0002-6973-0795
dc.contributor.orcidimecKenens, Bart::0000-0003-2329-5449
dc.contributor.orcidimecDe Coster, Hanne::0000-0002-5968-7703
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.contributor.orcidimecPeter, Antony::0000-0001-5941-0563
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecJourdan, Nicolas::0009-0005-4798-1736
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMurdoch, Gayle::0000-0002-6833-220X
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.date.accessioned2024-05-23T12:05:09Z
dc.date.available2023-08-07T17:07:23Z
dc.date.available2024-05-23T12:05:09Z
dc.date.issued2023
dc.identifier.doi10.1109/IITC/MAM57687.2023.10154710
dc.identifier.eisbn979-8-3503-1097-9
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42286
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalN/A
dc.source.numberofpages3
dc.title

Integrating 8nm Self-Aligned Tip-to-Tip to Enable 4-track Standard Cell Architecture as Scaling Booster

dc.typeProceedings paper
dspace.entity.typePublication
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