Publication:

Chemical mechanical polishing of InP

Date

2012
Journal article
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dc.contributor.authorOng, Patrick
dc.contributor.authorPeddeti, Shivaji
dc.contributor.authorLeunissen, Peter
dc.contributor.authorBabu, S.V.
dc.contributor.imecauthorOng, Patrick
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.date.accessioned2021-10-20T14:03:51Z
dc.date.available2021-10-20T14:03:51Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21227
dc.source.beginpageP184
dc.source.endpageP189
dc.source.issue4
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume1
dc.title

Chemical mechanical polishing of InP

dc.typeJournal article
dspace.entity.typePublication
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