Publication:
Oxygen in Czochralski silicon and its role in internal gettering
Date
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-09-29T12:39:47Z | |
| dc.date.available | 2021-09-29T12:39:47Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37 | |
| dc.source.beginpage | 1906 | |
| dc.source.book | Encyclopedia of Advanced Materials | |
| dc.source.endpage | 1912 | |
| dc.title | Oxygen in Czochralski silicon and its role in internal gettering | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |