Publication:
Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
Date
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Huber, A. | |
| dc.contributor.author | Onsia, Bart | |
| dc.contributor.author | Arnauts, Sophia | |
| dc.contributor.author | Kenis, Karine | |
| dc.contributor.author | Knotter, D. M. | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Onsia, Bart | |
| dc.contributor.imecauthor | Arnauts, Sophia | |
| dc.contributor.imecauthor | Kenis, Karine | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-09-30T11:40:45Z | |
| dc.date.available | 2021-09-30T11:40:45Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2487 | |
| dc.source.conference | 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS | |
| dc.source.conferencedate | 21/09/1998 | |
| dc.source.conferencelocation | Oostende Belgium | |
| dc.title | Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination? | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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