Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Plasma sealing of advanced organic low-k material
Publication:
Plasma sealing of advanced organic low-k material
Date
2011
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
22413.pdf
83.34 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Smirnov, Evgeny
;
Pantouvaki, Marianna
;
Huffman, Craig
;
Vanstreels, Kris
;
Baklanov, Mikhaïl
Journal
Abstract
Description
Metrics
Views
1951
since deposited on 2021-10-19
440
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1951
since deposited on 2021-10-19
440
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations