Publication:

Modeling of ferroelectric micro-cantilever actuator

Date

2023
Proceedings Paper
https://doi.org/10.1109/DTIP58682.2023.10267943
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dc.contributor.authorNguyen, Binh
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorZunic, Maja
dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorNguyen, Binh
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorZunic, Maja
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecNguyen, Binh::0000-0003-0830-3121
dc.contributor.orcidimecCzarnecki, Piotr::0000-0002-3648-3046
dc.contributor.orcidimecZunic, Maja::0000-0002-8350-1948
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2024-05-23T12:34:51Z
dc.date.available2023-11-27T17:27:09Z
dc.date.available2024-05-23T12:34:51Z
dc.date.issued2023
dc.description.wosFundingTextB.H. Nguyen acknowledges the funding from European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No.101063162.
dc.identifier.doi10.1109/DTIP58682.2023.10267943
dc.identifier.eisbn979-8-3503-4131-7
dc.identifier.issn2836-8487
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43190
dc.publisherIEEE
dc.source.conferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
dc.source.conferencedateMAY 28-31, 2023
dc.source.conferencelocationValetta
dc.source.journalN/A
dc.source.numberofpages6
dc.subject.keywordsCONSTITUTIVE MODEL
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsHYSTERESIS
dc.subject.keywordsBEHAVIOR
dc.title

Modeling of ferroelectric micro-cantilever actuator

dc.typeProceedings paper
dspace.entity.typePublication
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