Publication:

CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devices

Date

2012
Proceedings Paper
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dc.contributor.authorVincent, Benjamin
dc.contributor.authorGencarelli, Federica
dc.contributor.authorKumar, Arul
dc.contributor.authorVantomme, Andre
dc.contributor.authorMerckling, Clement
dc.contributor.authorLin, Dennis
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorEneman, Geert
dc.contributor.authorClarysse, Trudo
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDekoster, Johan
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-20T18:35:36Z
dc.date.available2021-10-20T18:35:36Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21804
dc.source.conference6th International Silicon- Germanium Technology and Device Meeting - ISTDM
dc.source.conferencedate4/06/2012
dc.source.conferencelocationBerkeley, CA USA
dc.title

CVD epitaxial growth of GeSn opens a new route for advanced Sn-based logic and photonics devices

dc.typeProceedings paper
dspace.entity.typePublication
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