Publication:

Stability and imaging of the ASML EUV Alpha Demo Tool

Date

2009
Proceedings Paper
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dc.contributor.authorHermans, Jan
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorLorusso, Gian
dc.contributor.authorHendrickx, Eric
dc.contributor.authorvan Dijk, Andre
dc.contributor.authorJonckheere, Rik
dc.contributor.authorGoethals, Mieke
dc.contributor.imecauthorHermans, Jan
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorvan Dijk, Andre
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecHermans, Jan::0000-0003-1249-8902
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-10-17T22:50:59Z
dc.date.available2021-10-17T22:50:59Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15466
dc.source.beginpage72710T
dc.source.conferenceAlternative Lithographic Technologies
dc.source.conferencedate22/02/2009
dc.source.conferencelocationSan Jose, CA USA
dc.title

Stability and imaging of the ASML EUV Alpha Demo Tool

dc.typeProceedings paper
dspace.entity.typePublication
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