Publication:
Damage minimized plasma pore sealing of microporous low k dielectrics
Date
| dc.contributor.author | Abell, Thomas | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T12:38:34Z | |
| dc.date.available | 2021-10-15T12:38:34Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8454 | |
| dc.source.beginpage | 16 | |
| dc.source.endpage | 19 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 76 | |
| dc.title | Damage minimized plasma pore sealing of microporous low k dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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