Publication:

Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge FIN structures

Date

2017-07

Meeting abstract

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Author(s)

;

Arimura, Hiroaki

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;

Witters, Liesbeth

;

Pourtois, Geoffrey

;

Schulze, Andreas

;

Douhard, Bastien

;

Vanherle, Wendy

;

Richard, Olivier

;

;

;

;

Collaert, Nadine

Metrics

1835 since deposited on 2021-10-24

Acq. date: 2025-12-15