Publication:
In-line process variance monitoring of advanced 3D TSV production lines
Date
| dc.contributor.author | Guittet, Pierre-Yves | |
| dc.contributor.author | Markwort, Lars | |
| dc.contributor.author | Savage, Greg | |
| dc.contributor.author | Jourdain, Anne | |
| dc.contributor.author | Halder, Sandip | |
| dc.contributor.imecauthor | Jourdain, Anne | |
| dc.contributor.imecauthor | Halder, Sandip | |
| dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
| dc.date.accessioned | 2021-10-18T16:46:48Z | |
| dc.date.available | 2021-10-18T16:46:48Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 1363-5182 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17199 | |
| dc.source.beginpage | 94 | |
| dc.source.endpage | 101 | |
| dc.source.issue | 34 | |
| dc.source.journal | Future Fab International | |
| dc.title | In-line process variance monitoring of advanced 3D TSV production lines | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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