Publication:
Mit zwei Chips optimale Kammern bauen
Date
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-14T23:28:16Z | |
| dc.date.available | 2021-10-14T23:28:16Z | |
| dc.date.issued | 2002-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6909 | |
| dc.source.beginpage | 38 | |
| dc.source.endpage | 39 | |
| dc.source.issue | 10 | |
| dc.source.journal | Elektronik Produktion & Prüftechnik | |
| dc.title | Mit zwei Chips optimale Kammern bauen | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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