Publication:
Defect assessment in advanced semiconductor materials and devices
Date
| dc.contributor.author | Poyai, Amporn | |
| dc.contributor.thesisadvisor | Claeys, Cor | |
| dc.date.accessioned | 2021-10-14T22:50:53Z | |
| dc.date.available | 2021-10-14T22:50:53Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2002-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6736 | |
| dc.title | Defect assessment in advanced semiconductor materials and devices | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |