Publication:

Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization

Date

2018
Proceedings Paper
https://doi.org/10.1117/1.JMM.17.4.041016
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dc.contributor.authorRutigliani, Vito
dc.contributor.authorLorusso, Gian
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorRispens, Gijsbert
dc.contributor.authorPapavieros, George
dc.contributor.authorGogolides, Evangelos
dc.contributor.authorCostantoudis, Vassilios
dc.contributor.authorMack, Chris
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorRispens, Gijsbert
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.accessioned2021-10-26T02:55:48Z
dc.date.available2021-10-26T02:55:48Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.doi10.1117/1.JMM.17.4.041016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31693
dc.identifier.urlhttps://doi.org/10.1117/12.2297264
dc.source.beginpage105851K
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXXII
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization

dc.typeProceedings paper
dspace.entity.typePublication
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