Metal removal without particle addition: optimization of the dilute HCl clean

dc.contributor.author	Hurd, Trace
dc.contributor.author	Mertens, Paul
dc.contributor.author	Hall, L. H.
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.imecauthor	Heyns, Marc
dc.date.accessioned	2021-09-29T12:42:17Z
dc.date.available	2021-09-29T12:42:17Z
dc.date.embargo	9999-12-31
dc.date.issued	1994
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/200
dc.source.beginpage	41
dc.source.conference	Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate	19/09/1994
dc.source.conferencelocation	Brugge Belgium
dc.source.endpage	45
dc.title	Metal removal without particle addition: optimization of the dilute HCl clean
dc.type	Proceedings paper
dspace.entity.type	Publication
Files	Original bundle Name: 192.pdf Size: 324.08 KB Format: Adobe Portable Document Format Download
Publication available in collections:	Conference contributions

Date